Absorber layer for electromagnetic radiation from visible spectrum and/or near-infrared spectrum, has dielectric matrix material has metal film, metal dielectric film, and composite film containing metal particles

摘要

An absorber layer comprises a composite film consisting of a dielectric matrix material and metal particles embedded in matrix material, provided on a substrate. The matrix material has a metal film having thickness of 50 nm or more, a metal dielectric film having thickness of 15-30 nm, on the metal film, a composite film having thickness of 15-30 nm and containing metal particles having diameter of 10 nm or less, which are randomly distributed, on the dielectric film. The composite volume of metal particles is 30% or more. An absorber layer comprises a composite film consisting of a dielectric matrix material and metal particles embedded in matrix material, provided on a substrate. The matrix material has a metal film having thickness of 50 nm or more, a metal dielectric film having thickness of 15-30 nm, on the metal film, a composite film having thickness of 15-30 nm and containing metal particles having diameter of 10 nm or less, which are randomly distributed, on the dielectric film. The composite volume of metal particles is 30% or more. The DC resistance of metal particles differs by less than one order of magnitude of DC resistance of dielectric matrix material.