Vacuum processing device comprises vacuum chamber, beam generator, and workpiece holding device in which workpiece to be machined is inserted, and which is rotatably mounted in tubular body, where first drive and second drive are provided

摘要

Vacuum processing device comprises a vacuum chamber (12), a beam generator (16), and a workpiece holding device (24), in which a workpiece (20) to be machined can be inserted. The workpiece holding device is rotatably mounted about its central axis in a tubular body (28), where a first drive is provided, with which the workpiece holding device is rotatable around its central axis and tubular body penetrates into a wall of the vacuum chamber and is rotatably mounted in the vacuum chamber. A second drive is provided for rotating the tubular body and workpiece holding device can be pivoted.