An integrated magnetic field sensor and method for a measurement of the position of a ferromagnetic workpiece with an integrated magnetic field sensor

摘要

An integrated magnetic field sensor, comprising a semiconductor body with a surface and a rear surface, and a metal carrier, with a front side and a rear side, wherein the rear surface of the semiconductor body with the front side of the metal substrate is connected in a force-locking manner, and a hall sensor, is formed on the surface of the semiconductor body, with a main extension surface, and a magnet with a along a first surface, first magnetic pole of the perpendicular to the first surface, central axis, wherein the metal carriers, the magnet and the semiconductor body are arranged in a common housing and in the housing consists of exactly one or at least one hall sensor is arranged, and wherein the first surface of the magnet perpendicular to the main extension surface of the hall sensor is formed and the central axis parallel to the main plane of extension of the hall sensor, and the center axis runs perpendicularly through the normal of the main extension surface, wherein the normal in the area center of gravity of the main extent surface and the field lines of the magnet is substantially parallel to the main extension surface of the hall sensor, such that a hall voltage is generated, if, by means of a ferromagnetic material, a part of the magnetic field lines perpendicular to the principal plane of the hall sensor can be deviated.