Reflectivity mes before direction, reflectivity mes the method, membrane thickness measuring device and the membrane thickness measuring method

摘要

A reflectivity mes in front of the direction (1) includes a light source (30), which an irradiating light (l1) supplies a measurement object, a spectroscopic detection unit (80), which in the case of more compartment shafts of the length of the intensity of illumination light (l1) and the intensity of reflection light (l2) from the object to be measured is detected, a coefficient - recording unit (92), which is a transform coefficients k (λ) for converting of a detected value of the intensity of each wavelength of the irradiation light (l1) in a value corresponding to a detected value of the intensity of each wavelength of the reflection light (l2) of a reference - measurement object, and a a reflectivity calculation unit (93), which the reflectivity of each wavelength based on the value is calculated, which the intensity of each wavelength of the reflection light (l2) - measurement object from the reference to obtain from the detected value of the intensity of each wavelength of the irradiation light (l1) and the transform coefficients k (λ). This configuration, the reflectivity of each wavelength of the object under test to accurately measure.