Micropump for generating a fluid flow, pump system and microchannel system

摘要

The invention relates to a micropump for generating a flow of a fluid (6) and having a pump chamber (2) bounded by an inlet (3) and an outlet (4). According to the invention, a lyophobic volume changing segment is disposed in the pump chamber (2), hollow spaces being formed between structures (10). The micropump comprises electrical means for cyclically changing the wetting behavior of the fluid (6) in the area of the volume changing segment, wherein the wetting behavior changes between a first dewetting state and a second wetting state, by means of which the boundary of the fluid (6) to the volume changing segment changes and the fluid (6) penetrates the hollow spaces in the wetting states and exits the hollow spaces in the dewetting state. The invention further relates to a microchannel system having such a micropump, and to a pump system.