Micropump for generating a fluid flow, pump system and microchannel system

摘要

A micropump for producing a flow of a fluid (6) with a pumping chamber (2) delimited by an inlet (3) and an outlet (4), characterized in that - the inlet (3) and / or the outlet (4) ) are formed by a valve structure (16), - on the inner wall of the pumping chamber (2) micro or nanostructures (10) are arranged to form a lyophobic volume change section, wherein the micro- or nanostructures in terms of their dimensions, material and wetting properties to the fluid (6) and its surface tensions (10) are tuned to allow a reversible and repeatable change between a first entendenenden and a second wetting state, wherein the micro or nanostructures (10) as a needle, column or line-like Elevations or depressions are formed from "black silicon" or "silicon grass"; The micropump comprises electrical means for cyclically changing the wetting behavior of the fluid (6) in the volume change section, the wetting behavior changing between the first de-wetting state and the second wetting state, whereby the boundary surface of the fluid (6) changes to the volume change section and the fluid ( 6) in the wetting state penetrates into cavities of the microstructures or nanostructures (10) and exits the cavities in the de-entrant state.