Method for manufacturing e.g. facet mirror, for extreme UV projection exposure system for microlithography, involves pressing optical functional body by applying pneumatic pressure on base body during reaction of reactive multi-layers

摘要

The method involves firmly bonding a base body (10) with an optical functional body i.e. mirror facet (11), that is provided with an optical function surface. Multiple reactive multi-layers (12) are provided for provision of connection heat. The functional body is pressed by applying pneumatic pressure (P) on the base body during reaction of the reactive multi-layers. The function surface of the functional body is separated during integral connection of the reactive multi-layers, which are arranged as a free standing layer package between the base body and the functional body. The base body and the functional body are made of ceramics, alumina ceramics, alumina, titanium aluminide, diamond, diamond-like carbon, glass and silicon. Independent claims are also included for the following: (1) a device for manufacturing an optical element or a multi mirror array element for extreme UV projection exposure system for microlithography (2) an optical element.