Vacuum processing system for treatment of substrates, has pressure separation device with separation element, which is extended in direction transverse to transport direction of substrates, by extending formation of gap on substrate

摘要

The system comprises a transport device (3) that is arranged in vacuum chamber (1) for transport of substrates (5) through chamber in transport direction. A pressure separation device with thin-walled, flat, flexible print separation element (7) is extended in a direction transverse to transport direction of substrates, by extending formation of gap on substrate. The separation element is made of flat knitted fabric, woven or braided fabric of metal fibers or metal wires of stainless steel.