首页> 外国专利> Method for mixing e.g. organic materials during deposition on substrate in vacuum state, involves transferring layer stack of two materials to substrate by flash lamp under mixing of two materials on substrate

Method for mixing e.g. organic materials during deposition on substrate in vacuum state, involves transferring layer stack of two materials to substrate by flash lamp under mixing of two materials on substrate

机译:混合方法例如有机材料在真空状态下沉积到基材上的过程中,涉及在基材上混合两种材料的情况下通过闪光灯将两种材料的层堆叠转移到基材上

摘要

The method involves applying layer stack (2) of two evaporation materials (7,8) on an intermediate carrier (1) at different evaporation temperature. The intermediate carrier is separated with mixing of the two materials on the substrate (3), and made up of quartz glass. The layer stack of two materials is transferred to the substrate by a flash lamp (4) under mixing of two materials on the substrate. The distance between the intermediate carrier and the substrate is set not more than 100 mu m.
机译:该方法包括在不同的蒸发温度下将两种蒸发材料(7,8)的叠层(2)施加在中间载体(1)上。中间载体通过混合两种材料在基板(3)上分离,并由石英玻璃制成。在基材上两种材料混合的情况下,两种材料的层堆叠通过闪光灯(4)转移到基材上。中间载体与基板之间的距离设定为不大于100μm。

著录项

  • 公开/公告号DE102012203229A1

    专利类型

  • 公开/公告日2013-04-11

    原文格式PDF

  • 申请/专利权人 VON ARDENNE ANLAGENTECHNIK GMBH;

    申请/专利号DE201210203229

  • 发明设计人 BURGHART MARKUS;GROSS HARALD;

    申请日2012-03-01

  • 分类号C23C14/28;H01L51/56;

  • 国家 DE

  • 入库时间 2022-08-21 16:21:43

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