首页>
外国专利>
Planarized electrode for improved performance in bulk acoustic resonators
Planarized electrode for improved performance in bulk acoustic resonators
展开▼
机译:平面电极可改善体声谐振器的性能
展开▼
页面导航
摘要
著录项
相似文献
摘要
In a representative embodiment, a bulk acoustic wave (BAW) resonator comprises: a cavity disposed in a substrate, a first electrode disposed over the cavity, a planarization layer disposed adjacent to the first electrode; a piezoelectric layer disposed over the first electrode and a second electrode disposed over the piezoelectric layer.
展开▼