METHOD FOR PRODUCING A DIRECT-REPORT BURNED ELECTRODE STRUCTURE AND STRUCTURE THUS OBTAINED

摘要

A device of the Microsystem and / or Nano-system type comprising: a first substrate (100) comprising at least one electrode (102), referred to as the lower electrode, and at least one dielectric layer (103), an intermediate substrate, (200 '), extending in a plane, said main plane of the device, comprising a movable part (210), - an upper substrate (300), assembled to the intermediate substrate (200'), said movable part being able to be put into operation. movement between the lower electrode and the upper substrate.