SURFACE ROUGHNESS ESTIMATION METHOD, AND SURFACE ROUGHNESS ESTIMATION DEVICE

摘要

PROBLEM TO BE SOLVED: To estimate surface roughness of a measurement object by rapid and simple processing.;SOLUTION: A copper foil having an anchor is used as a measurement object 100, the measurement object 100 is irradiated with X rays, and the state of the surface roughness is estimated on the basis of transmission quantity of the X rays. A measurement region of the measurement object is divided into micro regions a, b, c, ..., a detection value of the X rays having transmitted through the micro regions a, b, c, ... is acquired, frequency distribution of the detection value in each micro region is created, and the obtained frequency distribution is arithmetic-processed to calculate a surface roughness of the copper foil. An average value m and standard deviation σ of a frequency distribution curve are determined, an average thickness (Middle) of the measurement object 100 is measured using the average value m, a maximum thickness (Max) of the measurement object 100 is estimated by m-3σ, a minimum thickness (Mini) of the measurement object 100 is estimated by m+3σ, and a thickness dimension corresponding to ±3σ is estimated as a maximum height Ry of the surface roughness.;COPYRIGHT: (C)2014,JPO&INPIT