METHOD AND DEVICE FOR ADJUSTING ATMOSPHERE OF PUSHER TYPE CONTINUOUS CALCINATION FURNACE

摘要

PROBLEM TO BE SOLVED: To provide a method and a device for adjusting atmosphere of a pusher type continuous calcination furnace with which uniform calcination may be carried out by accurately changing calcination atmosphere of a treatment object.;SOLUTION: Each of base plates 11 transported by a pusher is covered with a capsule 12. At a position of each of calcination capsules 10 in a furnace main body, in order to adjust atmosphere in the calcination capsules 10, gas introducing side penetrating holes 15 and gas discharge side penetrating holes 16 are arranged. A hollow nozzle 17 comprising a plurality of slits 18 from which gas flows out in vertical direction is arranged on the gas introducing side penetrating holes 15 of the base plates 11 in a standing posture. On the base plates 11, placed is a setter 13 consisting of multi-stacked shelf boards 14 on which a treatment object is loaded. The slits 18 on the nozzle 17 are arranged so as to correspond to positions of the plurality of shelf boards 14. Gas flows out from the plurality of slits 18 arranged on the nozzle 17 and flows via the treatment object loaded on each of the multi-stacked shelf boards 14. Thereby, atmosphere in the calcination capsules 10 is adjusted to a designed atmosphere.;COPYRIGHT: (C)2014,JPO&INPIT