HEATING ELEMENT COMPENSATION ARRAY STRUCTURE FOR VACUUM HEAT TREATMENT FURNACE

摘要

PROBLEM TO BE SOLVED: To provide a vacuum heat treatment furnace adjusting uniform heating of a treatment object in a vacuum furnace.;SOLUTION: There is provided a heating element array structure for a vacuum heat treatment furnace in which heating elements constructing a heating element array have different electric resistances or different watt densities at different positions in the heating element array. In this array structure, in order to provide a more excellent temperature uniformity in one processing amount of the treatment object, heating elements having an electric resistance selected so as to provide heat required at a hot zone in a furnace are arrayed. The electric resistance and watt density of the heating element array are changed with the use of a first heating element comprising a certain geometry in one segment of the heating element array and a second heating element comprising a different geometry from the geometry of the first heating element in another segment in the heating element array.;COPYRIGHT: (C)2014,JPO&INPIT