LIGA-UV PROCESS FOR FABRICATING MULTILAYER METAL STRUCTURE HAVING ADJACENT LAYERS THAT ARE NOT ENTIRELY SUPERPOSED, AND STRUCTURE OBTAINED BY THE PROCESS

摘要

PROBLEM TO BE SOLVED: To improve problems of nonvertical growth of deposited metal and formation of bubbles above a resin when a second electrodeposited layer is not entirely superposed on a first layer.SOLUTION: A photoresist layer is applied on a metal substrate and heated; the layer is exposed through a mask to UV irradiation and developed by dissolving a part not photocured so as to obtain a mold; a first layer of metal or of an alloy is electrodeposited in an open part of the mold; the metal structure and the mold are levelled by machining so as to obtain a planar upper surface; and a metal basecoat layer is deposited on the entire upper surface. Then these steps are repeated. A second layer of metal or an alloy is electrodeposited in the open part of the mold; the multilayer metal structure thus obtained with a cured photoresist is detached from the substrate by interlayer delamination; the photoresist is separated so as to free the multilayer metal structure; and a portion of the metal basecoat layer which is not inserted between two electrodeposited metal layers is removed.