METHOD FOR PRODUCING SINGLE CRYSTAL GRAPHENE, AND TOUCH PANEL USING SINGLE CRYSTAL GRAPHENE

摘要

PROBLEM TO BE SOLVED: To provide a method for producing hexagonal graphene or a continuous graphene film by CVD using a carbon source such as camphor.;SOLUTION: Provided is a method for producing single crystal graphene by pyrolysis of a carbon source, comprising: placing a compound, which is the carbon source, on a first region; placing a substrate on a second region; vaporizing the compound by heating the first region; introducing the vapor of camphor into the heated second region with a carrier gas including at least argon and hydrogen; pyrolyzing the carbon compound on the substrate in the heated second region; and thereby forming a plurality of graphene domains on the substrate surface or forming graphene continuously on the entire substrate surface.;COPYRIGHT: (C)2014,JPO&INPIT