GAIN CALIBRATION SAMPLE, FILM THICKNESS MEASUREMENT DEVICE, AND GAIN CALIBRATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a gain calibration sample which enables accurate height adjustment of a measuring head.;SOLUTION: A gain calibration sample (60) has a height adjustment part (61) and a gain adjustment part (62). The height adjustment part (61) is a part for adjusting the height of a measuring head by measurement of a displacement sensor. The gain adjustment part (62) is a part for adjusting a gain of the measuring head.;COPYRIGHT: (C)2014,JPO&INPIT