MEMBER FOR CHARGED PARTICLE BEAM DEVICE, CHARGED PARTICLE BEAM DEVICE, AND BARRIER MEMBRANE MEMBER

摘要

PROBLEM TO BE SOLVED: To provide a charged particle beam device which can perform observation of a sample in a non-vacuum state and stably capture an observation image with high resolution.;SOLUTION: A member 56 for a charged particle beam device used for a charged particle beam device 1c includes a housing 55 which is attached to a housing 3c, and a barrier membrane element 18a which is provided in the housing 55. In the barrier membrane element 18a, a barrier membrane 19 which airtightly separates the inside and the outside of a vacuum chamber 4a in a state where the pressure of the inside of the vacuum chamber 4a partitioned by the housing 3c and the housing 55 is decompressed to the level lower than the pressure of the outside, and allows a charged particle beam to be transmitted therethrough is formed. In the barrier membrane element 18a, a buffer film 33 which prevents contact between a sample 12 and the barrier membrane 19 is formed on a position closer to a sample stage 22 side than the barrier membrane 19.;COPYRIGHT: (C)2014,JPO&INPIT