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FEMTOSECOND LASER PROCESSING MACHINE

机译:飞秒激光加工机

摘要

PROBLEM TO BE SOLVED: To provide a femtosecond laser processing machine making it possible to shorten a required time by expanding a processed area of irradiation per work time, which is related to a versatile labor-saving processing method, in processing that employs a femtosecond laser.SOLUTION: A light-source beam 21 oscillated from a femtosecond laser oscillator 19 is separated into a primary optic-axis beam 1 and plural branch beams 2 and 3 whose optical lengths are different from each other. An integrated beam 4 to and on which the primary optic-axis beam 1 and branch beams 2 and 3 are returned and concentrated is introduced into a condenser lens 7 in order to cause a time lag at the time of irradiation due to the difference in the optical length between the plural branch beams 2 and 3. The lens center position of the condenser lens 7 is deviated from the optical-axis center of the integrated beam 4. In addition, the condenser lens 7 is rotated about the optical-axis center of the integrated beam 4. Further, a work 41 that is an object of processing is moved, and the work 41 is continuously irradiated, whereby an irradiation trajectory is horizontally moved along the plane to be processed of the work 41, and thus shaped like a horizontal spiral. Besides, an irradiation focal area is expanded in an arc-like form.
机译:解决的问题:提供一种飞秒激光加工机,该飞秒激光加工机在采用飞秒激光的加工中,通过扩大每工作时间的辐照处理面积来缩短所需时间,这与通用的省力加工方法有关。解决方案:从飞秒激光振荡器19振荡的光源光束21分为主光轴光束1和多个光程互不相同的分支光束2和3。积分光束4被引入到聚光透镜7中,并且主光轴光束1,分支光束2和3返回并在其上被聚集,聚光光束4被聚集到聚光透镜7中,以由于在照射时的时间差而引起时间差。在多个分支光束2和3之间的光学长度。聚光透镜7的透镜中心位置偏离积分光束4的光轴中心。此外,聚光透镜7绕着聚光透镜4的光轴中心旋转。此外,移动作为加工对象的工件41,并且连续地照射工件41,从而使照射轨迹沿着工件41的待加工平面水平地移动,并且因此成形为水平螺旋。此外,辐照焦点区域以弧形形式扩展。

著录项

  • 公开/公告号JP2014004631A

    专利类型

  • 公开/公告日2014-01-16

    原文格式PDF

  • 申请/专利权人 HIGASHIYAMA TORU;

    申请/专利号JP20130189674

  • 发明设计人 HIGASHIYAMA AKEMI;

    申请日2013-09-12

  • 分类号B23K26/082;B23K26/067;B23K26/08;

  • 国家 JP

  • 入库时间 2022-08-21 16:18:52

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