ILLUMINATION OPTICAL SYSTEM FOR MICROSCOPE AND MICROSCOPE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an illumination optical system for a microscope from which a high quality sectioning effect is acquired.;SOLUTION: An incident light type three-dimensional microscope 100 observes a sample 101 placed on an object surface. An illumination optical system 110 which illuminates the sample 101 placed in the object surface includes three light source regions 114 coherent to each other and placed separated from each other on a pupil surface 113 of the illumination optical system. Distances of respective center of the three light source region 114 and a center of the pupil surface 113 of the illumination optical system are different with one another.;COPYRIGHT: (C)2014,JPO&INPIT