首页> 外国专利> POLYIMIDE TEMPORARY FIXATIVE, TEMPORARY FIXATIVE FILM-DEPOSITED SUBSTRATE, DOUBLE-LAYER TEMPORARY FIXATIVE FILM-DEPOSITED SUBSTRATE, SEMICONDUCTOR COMPOSITE SUBSTRATE, AND SEMICONDUCTOR ELECTRONIC COMPONENT

POLYIMIDE TEMPORARY FIXATIVE, TEMPORARY FIXATIVE FILM-DEPOSITED SUBSTRATE, DOUBLE-LAYER TEMPORARY FIXATIVE FILM-DEPOSITED SUBSTRATE, SEMICONDUCTOR COMPOSITE SUBSTRATE, AND SEMICONDUCTOR ELECTRONIC COMPONENT

机译:聚酰亚胺临时固定剂,临时固定膜沉积基体,双层临时固定膜沉积基体,半导体复合基体和半导体电子成分

摘要

PROBLEM TO BE SOLVED: To provide a polyimide temporary fixative enabling, on an occasion for executing a work for processing a compact semiconductor substrate having a small diameter or a small piece shape by using a semiconductor process device accessorizing a large-sized transportation system, the work by temporarily fixing the compact semiconductor substrate to a substrate transportable by the device.;SOLUTION: A polyimide temporary fixative endowed with chemical resistance, adhesive strength, heat resistance, and a function of peeling as a result of heating at a high temperature is used as a temporary fixative for temporarily fixing a compact semiconductor substrate to an adaptation substrate for reshaping the compact semiconductor substrate as a substrate adaptable to a semiconductor production work device transportation system so as not only to enable the transportation thereof to the device but also to ultimately eradicate the need for detaching the compact semiconductor substrate from the composite substrate.;COPYRIGHT: (C)2014,JPO&INPIT
机译:解决的问题:为了提供一种聚酰亚胺临时固定剂,该临时固定剂能够在通过使用对大型运输系统进行配装的半导体处理装置来执行用于加工具有小直径或小片状的紧凑型半导体基板的工作时,提供一种聚酰亚胺临时固定剂。通过将紧凑的半导体衬底临时固定到可通过该设备运输的衬底上来进行工作。解决方案:使用具有化学抗性,粘合强度,耐热性和由于高温加热而剥离的功能的聚酰亚胺临时固定剂作为临时固定剂,用于将紧凑型半导体衬底临时固定到适配衬底上,以将紧凑型半导体衬底重塑为适于半导体生产工作设备运输系统的衬底,从而不仅能够将其运输到设备,而且最终消除拆卸紧凑型半导体基板的需要te);;版权:(C)2014,JPO&INPIT

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