STEAM PERMEABILITY EVALUATION STRUCTURE BODY AND STEAM PERMEABILITY EVALUATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a steam permeability evaluation structure body that can correctly measure steam permeability in a high barrier film having the steam permeability of 10^-4 g/m²/day or less and is easily handled, and also to provide a steam permeability evaluation method.;SOLUTION: In a steam permeability evaluation structure body 1, an aluminum thin film 3 patterned in a wiring shape is arranged on a substrate 2 and sealing is performed to cover the aluminum thin film 3 by a high barrier film 4 to be a measurement object. The steam permeability evaluation structure body is used to evaluate steam permeability by observing aluminum hydroxide to be generated by a reaction between the aluminum thin film 3 and steam permeating through the high barrier film 4.;COPYRIGHT: (C)2014,JPO&INPIT