MASK ALIGNMENT DEVICE, MASK ALIGNMENT METHOD, FILM PRODUCTION DEVICE AND FILM PRODUCTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a mask alignment device or the like capable of easily adjusting an exposure position at high accuracy.;SOLUTION: A mask alignment device 100 comprises: an imaging device 14 including a first imaging part 7 and a second imaging part 8; a rail 13 of moving the imaging device 14; a controller 10; an image treatment apparatus 51; a monitor 52; and a position regulation apparatus 53. The image treatment apparatus 51 calculates a difference between the tilt angle of a mask pattern 3a in the image of the mask 3 taken by the first imaging part 7 in the imaging device 14 and the tilt angle of the mask pattern 3a in the image of the mask 3 taken by the second imaging part 8. Further, after the imaging device 14 is moved along the rail 13, it calculates a difference between the tilt angle of a scribe line 6 in the image of a roll 2a taken by the first imaging part 7 in the imaging device 14 and the tilt angle of the mask pattern 3a in the image of the mask 3 taken by the second imaging part 8.;COPYRIGHT: (C)2014,JPO&INPIT