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STRUCTURE, OPTICAL MEMBER, ANTIREFLECTION FILM, WATER-REPELLENT FILM, MASS ANALYSIS SUBSTRATE, PHASE PLATE, METHOD OF MANUFACTURING STRUCTURE, AND METHOD OF MANUFACTURING ANTIREFLECTION FILM
STRUCTURE, OPTICAL MEMBER, ANTIREFLECTION FILM, WATER-REPELLENT FILM, MASS ANALYSIS SUBSTRATE, PHASE PLATE, METHOD OF MANUFACTURING STRUCTURE, AND METHOD OF MANUFACTURING ANTIREFLECTION FILM
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机译:结构,光学元件,抗反射膜,防水膜,质量分析基质,相板,制造结构的方法以及抗反射膜的制造方法
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摘要
PROBLEM TO BE SOLVED: To provide: an antireflection film having a high antireflection effect and a manufacturing method therefor; an optical member excellent in antireflection effect; a water-repellent film having an excellent water-repellent property; a mass analysis substrate having a high detection sensitivity; a phase plate having high accuracy; and a structure capable of being used therefor, and a manufacturing method therefor.SOLUTION: A structure 11 having a plurality of cone parts (protrusion parts 12) on a surface thereof, is configured so that the cone part (protrusion part 12) has a mesostructure, and the mesostructure is a structure having a meso hole 13.
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