SURFACE MODIFICATION LAYER CHARACTERISTIC EVALUATION DEVICE AND CHARACTERISTIC EVALUATION METHOD OF SURFACE MODIFICATION LAYER

摘要

PROBLEM TO BE SOLVED: To provide a surface modification layer characteristic evaluation device capable of evaluating characteristics of a surface modification layer under a high-temperature atmosphere.;SOLUTION: The surface modification layer characteristic evaluation device includes: a first support 1 supporting a first member 101; a rotationally driving mechanism 2 configured to rotate the first support 1 around a rotation axial line L; a second support 4 supporting a second member 102 in such a manner that a contact surface of the second member 102 is positioned so as to face a contact surface of the first member 101; a forward/backward movement drive mechanism 5 configured to move forwards/backwards at least any one of the first support 1 and the second support 4 in a direction where the second support 4 and the first support 1 are made relatively close to each other and in a direction where the second support 4 and the first support 1 are made relatively away from each other; and a controller 6 which controls the rotationally driving mechanism 2 and the forward/backward movement drive mechanism 5. The controller 6 controls the rotationally driving mechanism 2 to rotate the first support 1 at a predetermined number of revolutions and controls the forward/backward movement drive mechanism 5 to bring the contact surface of the first member 101 supported by the first support 1 rotating at the predetermined number of revolutions into contact with the contact surface of the second member 102 to thereby press a surface modification layer with predetermined pressure.;COPYRIGHT: (C)2015,JPO&INPIT