METHOD OF PRODUCING CYCLIC SILANE COMPOUND AND SALT THEREOF AND SALT CONTAINING CYCLIC SILANE DIANION AND COMPOSITION CONTAINING CYCLIC SILANE DIANION SALT

摘要

PROBLEM TO BE SOLVED: To provide a method of producing a cyclic silane compound and salt thereof in high yield and efficiency and a novel salt consisting a cyclic silane dianion and a composition containing cyclic silane dianion salt which are easy to handle.SOLUTION: A method of producing a cyclic silane compound and salt thereof includes a process of reacting a halosilane compound in presence of at least one of a phosphonium salt and an ammonium salt and a compound represented by the specific formula.