首页> 外国专利> SPATIAL LIGHT MODULATOR, SPATIAL LIGHT MODULATION METHOD, PATTERN DRAWING DEVICE, PATTERN DRAWING METHOD, AND MANUFACTURING METHOD FOR SPATIAL LIGHT MODULATOR

SPATIAL LIGHT MODULATOR, SPATIAL LIGHT MODULATION METHOD, PATTERN DRAWING DEVICE, PATTERN DRAWING METHOD, AND MANUFACTURING METHOD FOR SPATIAL LIGHT MODULATOR

机译:空间光调制器,空间光调制方法,图形绘制设备,图形绘制方法以及空间光调制器的制造方法

摘要

PROBLEM TO BE SOLVED: To provide a technique for ensuring the extinction ratio of light modulation using photoelectric crystal substrates.;SOLUTION: Photoelectric crystal substrates 31 and 32 are provided. Light is passed through the photoelectric crystal substrate 31 and then through the photoelectric crystal substrate 32. By means of diffraction grating formed according to an applied voltage, each of the photoelectric crystal substrates 31 and 32 causes diffraction of light passed through. Since the respective polarization axes P1 and P2 of the substrates 31 and 32 are inclined at this time, the respective directions in which changes in refractive index increase differ from each other. That is, the respective directions in which the diffraction gratings of the substrates 31 and 32 exhibit anisotropy are different. Such a configuration makes it possible to perform an operation in which the polarization components of light that have not been modulated by the diffraction grating of the photoelectric crystal substrate 31 are modulated by the diffraction grating of the photoelectric crystal substrate 32. As a result, the rate at which light to be modulated is passed through without being modulated is restricted, thus the extinction ratio of light modulation can be ensured.;COPYRIGHT: (C)2014,JPO&INPIT
机译:解决的问题:提供一种确保使用光电晶体基板的光调制的消光比的技术。解决方案:提供光电晶体基板31和32。光穿过光电晶体基板31,然后穿过光电晶体基板32。借助于根据所施加的电压形成的衍射光栅,光电晶体基板31和32中的每一个引起通过的光的衍射。由于此时基板31和32的各个偏振轴P1和P2是倾斜的,因此折射率变化增加的各个方向彼此不同。即,基板31和32的衍射光栅表现出各向异性的各个方向是不同的。这样的配置使得可以执行以下操作:未由光电晶体基板31的衍射光栅调制的光的偏振分量被光电晶体基板32的衍射光栅调制。限制了要调制的光不被调制通过的速率,因此可以确保光调制的消光比。;版权所有:(C)2014,JPO&INPIT

著录项

  • 公开/公告号JP2014142494A

    专利类型

  • 公开/公告日2014-08-07

    原文格式PDF

  • 申请/专利权人 DAINIPPON SCREEN MFG CO LTD;

    申请/专利号JP20130011152

  • 发明设计人 OKAZAKI MASAHIDE;

    申请日2013-01-24

  • 分类号G02F1/03;G02F1/295;H01L21/027;G03F7/20;

  • 国家 JP

  • 入库时间 2022-08-21 16:17:26

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