MICROMIRROR ARRAY, MICROMIRROR ARRAY MANUFACTURING METHOD AND OPTICAL ELEMENT FOR USE IN MICROMIRROR ARRAY

摘要

PROBLEM TO BE SOLVED: To provide a micromirror array and an optical element for use in the micromirror array that can form a bright and high-luminance image, and to provide a micromirror array manufacturing method that can manufacture an array in an inexpensive cost without undergoing processes of a form release and a form removal.SOLUTION: A micromirror array manufacturing method according to the present invention is configured to include: a step of preparing a transparent tabular substrate; a step of mounting the substrate at a predetermined position on a processing stage of a dicing processing machine; a step of sequentially forming a plurality of lines of linear grooves in parallel with each other at a predetermined interval by use of a rotary cutter on one surface of respective substrates; overlapping the substrate having the linear groove formed on the one surface (front surface) by any of (D) overlapping a front surface of one substrate with a rear surface of the other substrate, (E) overlapping the front surface in each substrate with each other face-to-face and (F) overlapping the rear surface in each substrate with each other face-to-face; and making extension directions of the linear grooves 1g and 1'g in respective substrates 1 and 1' orthogonal to each other in a plane view.