The deceleration field scanning electron microscope which includes the microtome and this microtome inside the deceleration field scanning electron microscope which utilizes the portable possible knife

摘要

The scanning electron microscope (SEM) SEM which includes the microtome and this microtome which are laid out to in situ inside the chamber is disclosed. The microtome, has with the sample holder and the portable possible knife containment the aforementioned sample under high tension in order to generate the deceleration field in position of the sample. SEM, adjoining to the sample holder, has the backscattering electronic detector which distribution facilities is done. The knife in order to engage in the sample on the sample holder high tension on the sample without interfering, being moved, makes the surface expose where the sample is new by cutting off the one part of the sample thin. In addition, the aforementioned knife is installed, engaging in the sample, after making the surface expose where the sample is new, in order the deceleration field to save in the back space position which does not interfere.