CLEANING METHOD AND CLEANING DEVICE FOR COPING WITH LOW ENVIRONMENTAL LOAD

摘要

PROBLEM TO BE SOLVED: To provide a further practical cleaning method in a low environmental load, a cleaning unit for executing its method, and a cleaning device incorporated with its cleaning unit.;SOLUTION: A cleaning method executes shower treatment while supplying its liquid to a treatment object by generating a microbubble in electrolytic alkaline water as a cleaning liquid, and a cleaning unit comprises: a storage tank 102 for storing the electrolytic alkaline water as the cleaning liquid on the inside; a pump 104 for circulating the cleaning liquid; a microbubble generating nozzle 103 for generating the microbubble; and a shower nozzle 114 for executing the shower treatment, and the cleaning device comprises: a cleaning unit 200-2 for cleaning the treatment object; a rinse unit 200-3 for removing the cleaning liquid stuck to the treatment object; and a drying unit 200-4 for draining and drying the treatment object, and uses the cleaning unit as the cleaning unit 200-2.;COPYRIGHT: (C)2014,JPO&INPIT