PRECURSOR COATING SOLUTION OF MULTICOMPONENT OXIDE SEMICONDUCTOR AND METHOD OF PRODUCING MULTICOMPONENT OXIDE SEMICONDUCTOR FILM USING COATING SOLUTION

摘要

PROBLEM TO BE SOLVED: To provide a precursor coating solution of multicomponent oxide semiconductor which allows for deposition and patterning by a print method requiring high viscosity, e.g., screen printing, transfer printing, and the like, and a print method requiring medium viscosity, e.g., gravure printing, flexographic printing, and the like, and allows for formation of a transparent oxide semiconductor film having semiconductor electrical characteristics by firing.SOLUTION: Amine having a hydroxyl group or oxygen-containing heterocyclic amine is added, as a main organic solvent, to an aqueous solution produced by dissolving a salt of a plurality of metals and urea into water and agitated, and then it is heated to a temperature between 100°C and the boiling point of the main organic solvent, thus producing a precursor coating solution of multicomponent oxide semiconductor having viscosity of 0.5 Pa s or more at room temperature.