INFORMATION ACQUISITION DEVICE AND INFORMATION ACQUISITION METHOD FOR ACQUIRING INFORMATION ON SAMPLE USING TERAHERTZ WAVE

摘要

PROBLEM TO BE SOLVED: To provide a technique enabling an information acquisition device which acquires information on a sample to precisely acquire the information on the sample even when using a transmission member which is not uniform in thickness.;SOLUTION: There is provided an information acquisition device which acquires information on a sample 204, the information acquisition device including an irradiation part 220 which irradiates an irradiation position of the sample with a terahertz wave through a transmission member 203 in contact with the sample, a detection part 207 which detects a terahertz wave reflected by the transmission member and a terahertz wave reflected by the sample, a waveform acquisition part 212 which acquires a time waveform of the terahertz wave reflected by the transmission member and a time waveform of the terahertz wave reflected by the sample, and an information acquisition part 213 which acquires the information on the sample by using information on the time waveform of the terahertz wave reflected by the transmission member, the time waveform of the terahertz wave reflected by the sample, and the thickness of the transmission member at the irradiation position.;COPYRIGHT: (C)2015,JPO&INPIT