STONE SURFACE PLATE, PROCESSING METHOD OF STONE SURFACE PLATE, METHOD OF MANUFACTURING STONE SURFACE PLATE, AND SUBSTRATE PROCESSING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a stone surface plate capable of preventing the mirror surface while keeping the planarity of a stone surface plate, and to provide a processing method of a stone surface plate, a method of manufacturing a stone surface plate, and a substrate processing apparatus.SOLUTION: A laser processing machine forms a protrusion by irradiating a stone surface plate with laser light emitted from a laser marker 41, thereby processing the mounting surface of a substrate in the stone surface plate, and includes a frame 51, a laser marker 41 supported on the frame 51, a controller 42, and an exhaust pipe 43. The laser marker 41 and the controller 42 are connected by means of a cable 45. The exhaust pipe 43 and the controller 42 are connected by means of a connection pipe. A protective cover is disposed in the laser light irradiation region for the stone surface plate, out of a region surrounded by the frame 51.