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APPARATUS FOR MEASURING DRYING RATE AND METHOD FOR MEASURING DRYING RATE USING THE SAME
APPARATUS FOR MEASURING DRYING RATE AND METHOD FOR MEASURING DRYING RATE USING THE SAME
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机译:测量干燥速率的装置和使用该方法测量干燥速率的方法
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摘要
PROBLEM TO BE SOLVED: To provide an apparatus for measuring a drying rate and a method for measuring a drying rate using the same in order to measure the drying rate of a substrate material in manufacturing an electronic apparatus.;SOLUTION: The apparatus for measuring a drying rate may include a support part having a substrate seated thereon; and a marking part disposed above the substrate while being vertically and horizontally movable, and forming a marking on the substrate while being in contact with the substrate.;COPYRIGHT: (C)2014,JPO&INPIT
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