DIELECTRIC MULTILAYER FILM, GLASS PLATE WITH DIELECTRIC MULTILAYER FILM AND METHOD FOR PRODUCING GLASS PLATE WITH DIELECTRIC MULTILAYER FILM

摘要

PROBLEM TO BE SOLVED: To provide an easily etchable dielectric multilayer film.;SOLUTION: A dielectric multilayer film 12 is formed by alternately laminating low refractive index films 12a whose refractive index is relatively low and high refractive index films 12b whose refractive index is relatively high. The high refractive index films 12b have a number density of ≤7×10²² atoms/cm³.;COPYRIGHT: (C)2014,JPO&INPIT