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Products with a method and high-quality surface for producing the surface of the high-quality

机译:具有用于生产高质量表面的方法和高质量表面的产品

摘要

The present invention relates to a laser ablation method for coating by one or more surfaces of an object, the object to be coated, i.e. the substrate, uniformity is ± 100 nm of the surface to be deposited to the object to be coated and so that, to a method of coating by ablating a target. The coated surface of the object is advantageously absent micron sized particles, typically nano-technology surface the size of the individual particles is located at ± 25 nm at the maximum. Furthermore, the object relates to a product produced by the method.
机译:激光烧蚀方法技术领域本发明涉及一种激光烧蚀方法,该方法用于在一个或多个对象的一个​​或多个表面上进行涂覆,该待涂覆的对象即基板的均匀性是待沉积到待涂覆的对象的表面的±100nm,并且使得通过烧蚀靶进行涂覆的方法。物体的涂覆表面有利地不存在微米尺寸的颗粒,典型地,单个颗粒的尺寸的纳米技术表面最大位于±25nm。此外,该目的涉及通过该方法生产的产品。

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