Ultrasonic cleaning and processing methods ultrasonic cleaning equipment

摘要

PROBLEM TO BE SOLVED: To provide an ultrasonic cleaning apparatus, capable of suppressing damage to an object to be cleaned and exhibiting desired cleaning performance.;SOLUTION: The ultrasonic cleaning apparatus 1 includes: a cleaning processor 100 for applying ultrasonic cleaning processing to an object to be cleaned 800, by using a cleaning liquid 700; a vibrator 200 for applying ultrasonic vibration to the cleaning liquid 700; an oscillator 300 for supplying an electric signal of a desired amplitude, at a desired frequency to the vibrator 200 for causing the ultrasonic vibration of the vibrator 200 by the piezoelectric effect; a gas-dissolving section 400 for dissolving a desired gas 410 in the cleaning liquid 700; a gas concentration measuring section 500 for measuring the concentration of the gas 410 dissolved in the cleaning liquid 700; and a controller 600 for calculating an output range of the ultrasonic waves based on a database. The controller 600 controls the output value of the ultrasonic waves supplied by the oscillator 300 to the vibrator 200 and controls the electric signal supplied by the oscillator 300 to the vibrator 200, on the basis on the relation between the concentration of the gas 410 and the output range of the ultrasonic waves.;COPYRIGHT: (C)2011,JPO&INPIT