Failure diagnosis method, fault diagnosis equipment, program and test system

摘要

PROBLEM TO BE SOLVED: To prevent degradation in accuracy in estimation of failed spot.;SOLUTION: A failure diagnosis device 12 sets a stuck failure at an assumed failed spot in a semiconductor device 20 and executes a simulation. The failure diagnosis device 12 compares an output signal of a compressor 26 obtained by the simulation and an output signal of the compressor 26 observed by a test device 11, and sets an input signal to a compressor 27 according to the comparison result to execute a simulation. Then the failure diagnosis device 12 calculates a score of the assumed failed spot based on an output signal of the compressor 27 obtained by the simulation and an output signal of the compressor 27 observed by the test device 11.;COPYRIGHT: (C)2012,JPO&INPIT