HIGH PURITY ZINC OXIDE POWDER, METHOD FOR PRODUCING THE SAME, AND HIGH PURITY ZINC OXIDE TARGET AND HIGH PURITY ZINC OXIDE THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a high purity zinc oxide powder in which impurities, particularly C, Cl, S and Pb impurities, are removed efficiently at a low cost and a method for producing the same, to provide a target obtained by firing the high purity zinc oxide power, and to provide a high purity zinc oxide thin film obtained by sputtering the target.;SOLUTION: A method for producing a high purity zinc oxide powder includes the steps of: subjecting a raw material such as Zn-containing scrap to acid leaching or electrolytic extraction; subjecting the resulting raw material to solvent extraction and activated carbon treatment to remove impurities; neutralizing the solution free of impurities with an alkali solution to obtain zinc hydroxide; and firing the zinc hydroxide to obtain zinc oxide.;COPYRIGHT: (C)2014,JPO&INPIT