Winding manner of the wrinkle extending on the can roll and the long shaku substrate which is conveyed with the wrinkle extending device

摘要

PROBLEM TO BE SOLVED: To provide a method and apparatus for smoothing wrinkles of a long substrate, formed when executing the treatment with thermal loads thereon, on an outer circumferential surface of a can roll while winding the long substrate to be conveyed by the roll-to-roll system around the outer circumferential surface of the can roll and cooling the long substrate.;SOLUTION: An inclined part 21, in which the outside diameter of a can roll 56 is gradually reduced toward an end side of the can roll 56, is provided at a part, with which a part in the vicinity of an end of a long substrate F is brought into contact, in at least one end side of an outer circumferential surfaces 56a of the can roll 56. The long substrate F is expanded in the width direction by pressing an end of the long substrate F against the inclined part 21, by a wheel 31 provided on a part of the inclined part 21 which does not oppose treatment means 57-60 such as sputtering cathodes.;COPYRIGHT: (C)2012,JPO&INPIT