Surface charge distribution measurement method and surface charge distribution measuring device

摘要

PROBLEM TO BE SOLVED: To provide a surface charge distribution measuring method and a surface charge distribution measuring apparatus capable of measuring charge distribution on the surface of a dielectric substance in micron order while controlling electric field around the dielectric substance appropriately.;SOLUTION: A surface charge distribution measuring apparatus 1 for a sample comprises: an electron gun 11 for irradiating charged particle beams; a scan lens 19 for scanning the charged particle beams on a sample; an exposure light source 2 for forming an exposure pattern on the charged sample; a first electrode 64 which is contacted with one surface of the sample; and a second electrode 65 which is connected with the first electrode via a resistance member. Voltage is added so as to interlock electric potentials of the first electrode 64 and the second electrode 65, and a secondary electron emitted from the sample is detected by a detector 24.;COPYRIGHT: (C)2012,JPO&INPIT