Measuring device of measurement methods and surface charge distribution of the surface charge distribution

摘要

PROBLEM TO BE SOLVED: To allow a charge distribution generated on a surface of a sample to be measured with a micron-order high resolution.;SOLUTION: A method for measuring a surface charge distribution of a sample 23 includes steps of: charging the sample 23 at spots; obtaining an actual measurement value of potential at a potential saddle point; selecting a structure model and a temporary spatial charge distribution corresponding to it; calculating spatial potential at the potential saddle point from the structure model and the temporary spatial charge distribution; comparing the spatial potential and the actual measurement value with each other and, if the error is within a prescribed range, determining the temporary spatial charge distribution to be a spatial charge distribution of the sample 23; and calculating the surface charge distribution of the sample 23 by electromagnetic field analysis based on the determined spatial potential distribution.;COPYRIGHT: (C)2012,JPO&INPIT