Being cooling manner of the suffering treatment body which is cooled cooling manner of the suffering treatment body

摘要

PROBLEM TO BE SOLVED: To provide a cooling method of a workpiece capable of suppressing microscratches on the back of the workpiece.;SOLUTION: The cooling method of the workpiece W comprises a step for cooling the workpiece W for a first time by mounting the heated workpiece W on a workpiece supporting pin 50 to support the workpiece W under the pressure of vacuum treatment, supplying a cooling gas to cool the workpiece W at a first flow volume in a state that the workpiece W is separated from a cooling member, and raising its ambient pressure to a first level higher than that of the vacuum treatment, and a step for further cooling the workpiece W for a second time by lowering the workpiece supporting pin, supplying the cooling gas at a second flow volume larger than that of the first flow volume in a state that the workpiece is put on the cooling member or brought close to the member, and raising its ambient pressure to a second level higher than the first level.;COPYRIGHT: (C)2011,JPO&INPIT