Being iron density quantitative analysis limited decisive method of the measurement equipment which is used for the fixed quantity of iron density

摘要

PROBLEM TO BE SOLVED: To provide a means for determining a quantitative analysis limit in an analysis method of iron concentration in boron-doped p-type silicon with high reliability.;SOLUTION: This quantitative analysis determination method of an analysis method is used for obtaining iron concentration in boron-doped p-type silicon using the change of measurement values before and after Fe-B pair separation. The quantitative analysis limit is determined based on a quantitative value provided by obtaining iron concentration in the silicon by the analysis method during Fe-B pair separation in the boron-doped p-type silicon.;COPYRIGHT: (C)2011,JPO&INPIT