Sensor array and the 1st base material which possesses

摘要

PROBLEM TO BE SOLVED: To provide a pressure sensor, a sensor array, and a method of manufacturing the pressure sensor capable of preventing breakage of a membrane.;SOLUTION: The pressure sensor 6 includes: a support 61 having an opening part 61A; a pressure detection part 9 including a support film 62 provided on the support 61 and including a diaphragm 7 closing the opening part 61A and a piezoelectric body 63 provided on the diaphragm 7 and outputting an electric signal by bending; a frame body 64 including a cylindrical hollow part 64A along the film thickness direction of the support film 62 on the pressure detection part 9 and formed at a position where a cylindrical inner circumferential wall 641 of the cylindrical hollow part 64A overlaps with the opening part 61A or outside the opening part 61A in plan view seeing the support film 62 from the film thickness direction; a sealing film 65 closing the frame body 64; and silicone oil 20 charged into an internal space 66 formed by the cylindrical inner circumferential wall 641 of the cylindrical hollow part 64A, the sealing film 65, and the pressure detection part 9.;COPYRIGHT: (C)2011,JPO&INPIT