Inorganic oxide fine particle dispersion , abrasive particle dispersion and polishing composition

摘要

PROBLEM TO BE SOLVED: To provide dispersion liquid showing excellent polishing speed (polishing rate) and dispersed with polishing particles capable of remarkably suppressing generation of linear traces on a surface of a base material to be polished.;SOLUTION: This inorganic oxide particulate dispersion liquid is composed by dispersing inorganic oxide particulates having an average particle diameter (D1) measured by a dynamic light scattering method in the range of 3-300 nm and specific surface area (Sa) in the range of 10-800 m²/g in a dispersant. The inorganic oxide particulates satisfy conditions that (1) the number of each of the inorganic oxide particulates having a minor axis/major axis ratio determined by a microscope is in the range of 0.3-0.8 is made in the range of 20-45% of the number of all the inorganic oxide particulates, and (2) the number of each of the inorganic oxide particulates having a minor axis/major axis ratio determined by an electronic microscope is in the range of ≤0.5 is made ≤10% of the number of all the inorganic oxide particulates.;COPYRIGHT: (C)2011,JPO&INPIT