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METHOD FOR PREPARING THIN FILM DEVICE AND METHOD FOR PREPARING COMMON MODE FILTER USING THE SAME

机译:薄膜器件的制备方法和使用该薄膜器件的共模滤波器的制备方法

摘要

PROBLEM TO BE SOLVED: To improve alignment in a lithography process for a second conductive pattern, by making a first insulation layer planar to electrically insulate a first conductive pattern from the second conductive pattern in a thin film device.;SOLUTION: At least one first conductive pattern 33A to 33C are formed on a substrate 31. A dry polyimide film 37 is placed on the first conductive pattern 33A to 33C. Force is applied to the dry polyimide film 37 such that the dry polyimide film 37 fills space 41 in the first conductive pattern 33A to 33C. At least one second conductive pattern 43A to 43C is formed on the dry polyimide film 37, to prepare the thin film device.;COPYRIGHT: (C)2014,JPO&INPIT
机译:解决的问题:通过使第一绝缘层平面化以使薄膜器件中的第二导电图案与第一导电图案电绝缘,以提高第二导电图案的光刻工艺中的对准性;解决方案:至少一个第一导电图案33A至33C形成在基板31上。干燥的聚酰亚胺膜37放置在第一导电图案33A至33C上。向干燥的聚酰亚胺膜37施加力,使得干燥的聚酰亚胺膜37填充第一导电图案33A至33C中的空间41。在干聚酰亚胺膜37上形成至少一个第二导电图案43A至43C,以制备薄膜器件。;版权所有:(C)2014,JPO&INPIT

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