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Bolometer resistance material, infrared detector bolometer using the same, and method of manufacturing the same
Bolometer resistance material, infrared detector bolometer using the same, and method of manufacturing the same
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机译:强度计电阻材料,使用该材料的红外探测器强度计及其制造方法
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摘要
A resistive material for a bolometer, a bolometer for an infrared detector using the material, and a method of manufacturing the bolometer are provided. In the resistive material, at least one element selected from the group consisting of nitrogen (N), oxygen (O) and germanium (Ge) is included in antimony (Sb). The resistive material has superior properties such as high temperature coefficient of resistance (TCR), low resistivity, a low noise constant, and is easily formed in a thin film structure by sputtering typically used in a complementary metal-oxide semiconductor (CMOS) process, so that it can be used as a resistor for the bolometer for an uncooled infrared detector, and thus provide the infrared detector with superior temperature precision.
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