Sample processed observation device and profile process observation manner

摘要

PPROBLEM TO BE SOLVED: To provide an apparatus for working and observing a sample capable of efficiently working and observing a large cross section while securing cross section position accuracy; and a method of working and observing a cross section. PSOLUTION: This apparatus 1 for working and observing a sample comprises: a sample base 2 on which a sample S is to be mounted; a first ion beam lens barrel 3 capable of emitting a first ion beam I1 over the whole of a predetermined irradiation range 3a at the same time; a mask 6 that can be arranged between the sample base 2 and the first ion beam lens barrel 3, and shields part of the first ion beam I1; a mask-moving means 7 capable of moving the mask 6; a charged particle beam lens barrel 4 capable of running a focused beam E of charged particles in the range 3a irradiated with the first ion beam I1; and a detection means 12 capable of detecting a secondarily generated substance. PCOPYRIGHT: (C)2009,JPO&INPIT