Sample holder, ion milling device, sample processing method, sample observation method, and sample processing and observation method

摘要

After processing an analytical sample in a processing apparatus, the side entry type sample holder which enables observation by an observation apparatus without removing the said analytical sample from a sample holder is proposed. The sample holder is connected with a grip 34, a sample holder main body 35 extending from the grip 34, and a sample holder main body 35, and a sample stand 204 for fixing the sample 203 is provided. The relative positional relationship between the distal end 32 provided, the processing surface of the specimen 203 fixed to the specimen stage 204, and the irradiation direction of the ion beam is changed, and the distal end 32 during the specimen 203 processing is changed. A mechanism for avoiding the irradiation of the ion beam is provided (see FIG. 3).